Highly integrated and intelligent vacuum system designed for high-cycle vacuum applications.Suitable for continuous coating processes of large-area vacuum coating (PV glass, architectural glass, flexible substrates, lithium battery electrodes), greatly reducing downtime for material replacement.

Strong Performance & Continuous Stable Operation

◆ Lower pump: MS dry screw pump, stable under cyclic pressure from Atm to 100 Pa,shaft power variation < +15%, no overload

◆ Upper pump: MSR/ MDR booster pump, continuous operation under cyclic pressure from Atm to 0 Pa

Stable Vacuum Level

◆ Upper pump with MDR booster ensures high vacuum level, still maintains 0.05 torr even with wear from high-speed gas flow or corrosive media

Fast Pumping Speed

◆ MDR booster provides higher pumping speed in the same volume,faster high-vacuum achievement