Highly integrated vacuum system equipped with self-developedMHS series hybrid dryvacuum pumps.Smaller size and lowerpower consumption at the same pumping capacity.Comparablewith top international brands and fully capable of domestic substitution,ensuring performance while reducing operating costs.

Ultra-energy-saving: Energy consumption 40%-60%lower than foreign competitors

◆ ALD . EDC4000: Pumping capacity 60000 L/min . Power consumption 2.1 kW-h
◆ PECVD . EDC2000: Pumping capacity 30000 L/min . Power consumption 1.1 kW-h

Corrosion Resistant

◆ Rotors of BP pump adopt 316SS or other corrosion-resistant alloys;pump casing with coating.Resistant to CI, CF, CHF, TEOS, F2HF and other corrosive gases,suitable for harsh process conditions.